Kunyangwe ultrafast lasers yanga iripo kwemakumi emakore, maindasitiri ekushandisa akakura nekukurumidza mumakumi maviri emakore apfuura. Muna 2019, kukosha kwemusika kweUltrafastLaser zvinhukugadzirisa kwaive kunosvika US$460 miriyoni, ine huwandu hwekukura kwepagore hwe13%. Nzvimbo dzekushandisa uko ultrafast lasers dzakashandiswa zvinobudirira kugadzirisa maindasitiri zvinhu zvinosanganisira kugadzirwa kwefotomask uye kugadzirisa muindasitiri yesemiconductor pamwe nesilicon dicing, kucheka girazi / kunyora uye (indium tin oxide) ITO firimu kubviswa mumagetsi evatengi senge mbozha nhare uye mahwendefa. , piston texturing yeindasitiri yemotokari, coronary stent kugadzira uye microfluidic mudziyo kugadzira indasitiri yekurapa.
01 Photomask kugadzira uye kugadzirisa mune semiconductor indasitiri
Ultrafast lasers yakashandiswa mune imwe yekutanga maindasitiri application mukugadzira zvinhu. IBM yakashuma kushandiswa kwefemtosecond laser ablation mukugadzirwa kwephotomask muma1990. Kuenzaniswa ne nanosecond laser ablation, iyo inogona kuburitsa simbi spatter uye girazi kukuvadzwa, femtosecond laser masks inoratidza hapana simbi spatter, hapana girazi kukuvadzwa, nezvimwe zvakanakira. Iyi nzira inoshandiswa kugadzira maseketi akabatanidzwa (ICs). Kugadzira IC chip kungada kusvika kumasiki makumi matatu uye inodhura> $100,000. Femtosecond laser processing inogona kugadzirisa mitsara uye mapoinzi pazasi 150nm.
Mufananidzo 1. Photomask kugadzirwa uye kugadzirisa
Mufananidzo 2. Kugadzirisa migumisiro yemasikirwo akasiyana-siyana ekunyanyisa ultraviolet lithography
02 Silicon yekucheka mune semiconductor indasitiri
Silicon wafer dicing inzira yekugadzira yakajairwa muindasitiri yesemiconductor uye inowanzoitwa uchishandisa mechanicha dicing. Aya mavhiri ekucheka anowanzo gadzira microcracks uye anonetsa kucheka matete (eg ukobvu <150 μm) mawafer. Laser kucheka kwesilicon wafers kwave kuchishandiswa muindasitiri yesemiconductor kwemakore mazhinji, kunyanya kune zvitete zvitete (100-200μm), uye inoitwa mumatanho akati wandei: laser grooving, ichiteverwa nemakanika kupatsanura kana kucheka kucheka (kureva infrared laser beam mukati. iyo silicon scribing) inoteverwa nemakanika tepi kuparadzaniswa. Iyo nanosecond pulse laser inogona kugadzira gumi neshanu wafers paawa, uye picosecond laser inogona kugadzira makumi maviri nematatu wafers paawa, nemhando yepamusoro.
03 Girazi rekucheka / kunyora muindasitiri yemagetsi inodyiwa
Mabatiro ekubata uye magirazi ekudzivirira enharembozha nemalaptop ari kutetepa uye mamwe maumbirwo ejometri akakombama. Izvi zvinoita kuti chinyakare chekucheka chemuchina chiome. Ma lasers akajairika anowanzo gadzira yakashata yekucheka mhando, kunyanya kana aya magirazi ekuratidzira akaturikidzana 3-4 akaturikidzana uye epamusoro 700 μm gobvu rekudzivirira girazi rinodzivirirwa, iro rinogona kutyoka nekushushikana kwenzvimbo. Ultrafast lasers yakaratidzwa kuti inokwanisa kucheka magirazi aya nesimba riri nani rekumucheto. Kune yakakura flat panel yekucheka, iyo femtosecond laser inogona kutariswa kuseri kwepepa regirazi, ichikwenya mukati megirazi pasina kukuvadza kumberi. Girazi rinobva ratyoka uchishandisa michina kana yekupisa nzira padivi peiyo yakapihwa pateni.
Mufananidzo 3. Picosecond ultrafast laser glass special-shaped cutting
04 Piston maumbirwo muindasitiri yemotokari
Injini dzemotokari dzakareruka dzakagadzirwa nearuminiyamu alloys, ayo asina kupfeka-kusagadzikana sesimbi yakakandwa. Zvidzidzo zvakaona kuti femtosecond laser processing yemotokari piston textures inogona kuderedza kukweshera kusvika 25% nekuti marara neoiri zvinogona kunyatso chengetwa.
Mufananidzo 4. Femtosecond laser processing yemotokari injini pistons kuvandudza injini kushanda
05 Coronary stent kugadzira muindasitiri yezvokurapa
Mamiriyoni emacoronary stents anoiswa mutsinga dzepamwoyo kuti avhure nzira kuti ropa riyerere mutsinga dzakagwamba, zvichiponesa mamiriyoni evanhu gore negore. Coronary stents anowanzo gadzirwa kubva kusimbi (semuenzaniso, simbi isina tsvina, nickel-titanium chimiro memory alloy, kana ichangopfuura cobalt-chromium alloy) waya mesh ine strut upamhi hunosvika zana μm. Kuenzaniswa neakareba-pulse laser kucheka, zvakanakira kushandisa ultrafast lasers kucheka mabhuraketi akakwira akachekwa mhando, kupedzisa kurinani kwepamusoro, uye marara mashoma, izvo zvinoderedza post-kugadzirisa mutengo.
06 Kugadzirwa kweMicrofluidic mudziyo weindasitiri yezvokurapa
Microfluidic zvishandiso zvinowanzo shandiswa muindasitiri yekurapa kuongororwa kwechirwere uye kuongororwa. Izvi zvinowanzo gadzirwa ne micro-jekiseni molding yezvikamu zvega uyezve kubatanidza uchishandisa gluing kana welding. Ultrafast laser yekugadzira michina yemicrofluidic ine mukana wekugadzira 3D microchannels mukati mezvinhu zvakajeka segirazi pasina kudiwa kwekubatanidza. Imwe nzira ndeye ultrafast laser kugadzirwa mukati megirazi rakawanda rinoteverwa nekunyorova kwemakemikari etching, uye imwe ndeye femtosecond laser ablation mukati megirazi kana purasitiki mumvura yakasvibiswa kubvisa marara. Imwe nzira ndeyemuchina machani mukati megirazi pamusoro uye nekuasimbisa nekavha yegirazi kuburikidza nefemtosecond laser welding.
Mufananidzo 6. Femtosecond laser-induced selective etching kugadzirira microfluidic channels mukati megirazi zvinhu.
07 Kuboora kadiki kejekiseni nozzle
Femtosecond laser microhole machining yakatsiva micro-EDM kumakambani mazhinji mumusika wekudzvanya jekiseni nekuda kwekuchinja kukuru mukuchinja kuyerera kwegomba profiles uye ipfupi machining nguva. Iko kugona kudzora otomatiki chinzvimbo chekutarisa uye kurereka kwedanda kuburikidza neyakatangira scan musoro kwakatungamira kune dhizaini yemaprofile profiles (semuenzaniso, mbiya, flare, convergence, divergence) inogona kusimudzira atomization kana kupinda mukamuri yekupisa. Kuchera nguva kunoenderana ablation vhoriyamu, pamwe chibooreso ukobvu 0.2 - 0.5 mm uye gomba dhayamita 0.12 - 0.25 mm, zvichiita nzira iyi kagumi nokukurumidza kupfuura micro-EDM. Microdrilling inoitwa mumatanho matatu, kusanganisira roughing uye kupedza kuburikidza-pilot maburi. Argon inoshandiswa segasi rinobatsira kuchengetedza gomba kubva kune oxidation uye kuchengetedza plasma yekupedzisira panguva dzekutanga.
Mufananidzo 7. Femtosecond laser yakakwirira-chaiyo kugadzirisa ye inverted taper gomba redhiziri injini jekiseni.
08 Ultra-nekukurumidza laser texturing
Mumakore achangopfuura, kuitira kuti uvandudze kurongeka kwemuchina, kuderedza kukuvadzwa kwezvinhu, uye kuwedzera mashandiro ekugadzirisa, iyo ndima ye micromachining yave zvishoma nezvishoma inotariswa nevaongorori. Ultrafast laser ine zvakasiyana-siyana zvekugadzirisa zvakanakira senge kukuvadzwa kwakaderera uye kurongeka kwepamusoro, iyo yave chinangwa chekusimudzira kusimudzira kwekugadzira tekinoroji. Panguva imwecheteyo, ultrafast lasers inogona kuita pane dzakasiyana siyana, uye laser kugadzirisa zvinhu kukuvara zvakare inzira huru yekutsvagisa. Ultrafast laser inoshandiswa kubvisa zvinhu. Kana iyo simba density yelaser yakakwira kupfuura iyo ablation chikumbaridzo chechinhu, pamusoro peiyo ablated zvinhu inoratidza micro-nano chimiro chine humwe hunhu. Tsvagiridzo inoratidza kuti iyi yakakosha nzvimbo Chimiro chinhu chakajairika chinoitika kana laser kugadzirisa zvinhu. Kugadzirira kwepamusoro micro-nano zvimiro zvinogona kuvandudza zvimiro zvechinyorwa pachayo uye zvakare kugonesa kugadzirwa kwezvinhu zvitsva. Izvi zvinogadzira kugadzirira kwepamusoro micro-nano zvimiro ne Ultrafast laser nzira yehunyanzvi ine kukosha kwakakosha kwekusimudzira. Parizvino, kune zvigadzirwa zvesimbi, kutsvagisa nezve ultrafast laser surface texturing kunogona kuvandudza simbi pamusoro pemvura yekunyorova zvivakwa, kunatsiridza kukweshera kwepamusoro uye kupfeka zvivakwa, kuwedzera kunamira kwekunamira, uye kupararira kwekutungamira uye kunamatira kwemaseru.
Mufananidzo 8. Superhydrophobic properties ye-laser-yakagadzirirwa silicon pamusoro
Seyekucheka-kumucheto kugadzirisa tekinoroji, ultrafast laser process ine hunhu hwenzvimbo diki-inobatwa nekupisa, isiri-mutsara nzira yekudyidzana nezvinhu, uye yakakwirira-resolution kugadzirisa kupfuura iyo diffraction muganho. Inogona kuona yakakwirira-mhando uye yakakwirira-chaiyo micro-nano kugadzirisa kwezvinhu zvakasiyana. uye matatu-dimensional micro-nano chimiro chekugadzira. Kuwana laser kugadzira kwezvinhu zvakakosha, zvimiro zvakaoma uye yakakosha michina inovhura nzira nyowani dzekugadzira micro-nano. Parizvino, femtosecond laser yakashandiswa zvakanyanya munzvimbo dzakawanda dzesainzi: femtosecond laser inogona kushandiswa kugadzirira akasiyana siyana optical zvishandiso, senge microlens arrays, bionic compound maziso, optical waveguides uye metasurfaces; kushandisa kwayo kurongeka kwepamusoro, kugadziriswa kwepamusoro uye Iine matatu-dimensional kugadzirisa kugona, femtosecond laser inogona kugadzirira kana kubatanidza microfluidic uye optofluidic machipisi akadai se microheater components uye matatu-dimensional microfluidic chiteshi; uyezve, femtosecond laser inogonawo kugadzirira mhando dzakasiyana dzepasi micro-nanostructures kuti iwane anti-reflection, anti-reflection, super-hydrophobic, anti-icing uye mamwe mabasa; kwete izvozvo chete, femtosecond laser yakashandiswawo mumunda webiomedicine, ichiratidza kuita kwakatanhamara muminda yakadai sebiological micro-stents, cell tsika substrates uye biological microscopic imaging. Tarisiro huru yekushandisa. Parizvino, minda yekushandisa yefemtosecond laser process iri kuwedzera gore negore. Pamusoro pezvataurwa pamusoro apa micro-optics, microfluidics, multi-functional micro-nanostructures uye biomedical engineering application, inoitawo basa rakakura mune mamwe minda ari kubuda, senge metasurface kugadzirira. , micro-nano kugadzira uye akawanda-dimensional optical ruzivo rwekuchengetedza, nezvimwe.
Nguva yekutumira: Kubvumbi-17-2024
