Kunyangwe ma-laser e-ultrafast ave aripo kwemakumi emakore, mashandisirwo emaindasitiri akawedzera nekukurumidza mumakumi maviri emakore apfuura. Muna 2019, kukosha kwemusika kwe-ultrafastzvinhu zve laserKugadziriswa kwacho kwaive mamiriyoni emadhora ekuAmerica mazana mana nemakumi matanhatu, nekukura kwegore negore kwe13%. Nzvimbo dzekushandisa uko malaser e-ultrafast akashandiswa zvinobudirira kugadzirisa zvinhu zvemaindasitiri dzinosanganisira kugadzirwa uye kugadziriswa kwema photomask muindasitiri ye semiconductor pamwe ne silicon dicing, kucheka/kunyora magirazi uye (indium tin oxide) kubviswa kwemafirimu eITO mumagetsi evatengi akadai semafoni nemapiritsi, piston texturing yeindasitiri yemotokari, coronary stent kugadzira uye microfluidic device kugadzira indasitiri yekurapa.
01 Kugadzira nekugadzirisa ma photomask muindasitiri ye semiconductor
Malaser e Ultrafast akashandiswa mune imwe yenzira dzekutanga dzekugadzira zvinhu. IBM yakashuma kushandiswa kwe femtosecond laser ablation mukugadzira photomask muma1990. Zvichienzaniswa ne nanosecond laser ablation, iyo inogona kukonzera simbi inopararira uye kukuvara kwegirazi, femtosecond laser masks hairatidzi simbi inopararira, haina kukuvara kwegirazi, nezvimwewo. Zvakanakira. Nzira iyi inoshandiswa kugadzira ma integrated circuits (ICs). Kugadzira IC chip kunogona kutora kusvika kumamask makumi matatu uye kunodhura >$100,000. Femtosecond laser processing inogona kugadzirisa mitsara nemapoinzi ari pasi pe150nm.
Mufananidzo 1. Kugadzirwa nekugadzirisa mamasiki emufananidzo
Mufananidzo 2. Mhedzisiro yekugadzirisa mapatani akasiyana emamasiki ekudzivirira ultraviolet lithography yakanyanya
02 Kucheka silicon muindasitiri yesemiconductor
Kucheka silicon wafer inzira yakajairika yekugadzira muindasitiri yesemiconductor uye inowanzoitwa uchishandisa mechanical dicing. Mavhiri aya ekucheka anowanzoita ma microcracks uye akaoma kucheka matete (semuenzaniso ukobvu < 150 μm). Kucheka silicon wafers nelaser kwave kuchishandiswa muindasitiri yesemiconductor kwemakore mazhinji, kunyanya kune matete (100-200μm), uye kunoitwa mumatanho akasiyana-siyana: laser grooving, inoteverwa nekupatsanurwa kwemechanical kana kucheka kwakavanzika (kureva infrared laser beam mukati mesilicon scribing) inoteverwa nekupatsanurwa kwemechanical tape. Nanosecond pulse laser inogona kugadzirisa mawafers gumi nemashanu paawa, uye picosecond laser inogona kugadzirisa mawafers makumi maviri nematatu paawa, nerunako rwepamusoro.
03 Kucheka/kunyora magirazi muindasitiri yemagetsi inodyiwa
Magirazi ekubata uye magirazi ekudzivirira emafoni nemalaptop ari kutetepa uye mamwe maumbirwo ejometri anokombama. Izvi zvinoita kuti kucheka kwemuchina wekare kuve kwakaoma. Malaser akajairika anowanzo gadzira mhando isina kunaka yekucheka, kunyanya kana magirazi aya akaiswa muzvikamu zvitatu kusvika zvina uye girazi rekudzivirira repamusoro re700 μm rakapfava, izvo zvinogona kupwanyika nekumanikidzwa kwenzvimbo. Malaser anokurumidza kupenya akaratidzwa kuti anokwanisa kucheka magirazi aya nesimba riri nani remucheto. Pakucheka kukuru kwepaneru yakatsetseka, femtosecond laser inogona kutariswa kumashure kwegirazi, ichikwenya mukati megirazi pasina kukuvadza pamusoro pepamberi. Girazi rinogona kupwanywa uchishandisa michina kana thermal means zvichienderana nepattern yakarongwa.
Mufananidzo 3. Kucheka kwakagadzirwa negirazi rePicosecond ultrafast laser glass
04 Magadzirirwo episton muindasitiri yemotokari
Injini dzemotokari dzakareruka dzakagadzirwa nearuminiyamu, dzisingatsvedzereki sesimbi yakakandwa. Ongororo dzakawana kuti kushandiswa kwefemtosecond laser kwemagadzirirwo episton yemotokari kunogona kuderedza kukweshana kusvika ku25% nekuti marara nemafuta zvinogona kuchengetwa zvakanaka.
Mufananidzo 4. Kugadziriswa kwemapistoni einjini yemotokari nefemtosecond laser kuti injini ishande zvakanaka
05 Kugadzirwa kweCoronary stent muindasitiri yezvekurapa
Mamiriyoni ema "coronary stents" anoiswa mutsinga dzeropa dzemuviri kuti avhure nzira yekuti ropa riyerere mutsinga dzinenge dzakagwamba, zvichiponesa mamiriyoni evanhu gore rega rega. Ma "coronary stents" anowanzogadzirwa nesimbi (semuenzaniso, simbi isingatsvedzeri, nickel-titanium shape memory alloy, kana cobalt-chromium alloy yazvino uno) ine tambo ine upamhi hwe strut hunosvika 100 μm. Zvichienzaniswa ne "long-pulse laser cutting", zvakanakira kushandisa ma "ultrafast lasers" kucheka mabrackets ndezvemhando yepamusoro, kupenya kwepamusoro, uye marara mashoma, izvo zvinoderedza mari yekugadzirwa mushure mekugadzirisa.
06 Kugadzira michina ye microfluidic yeindasitiri yekurapa
Midziyo yemicrofluidic inowanzo shandiswa muindasitiri yezvekurapa pakuongorora nekuongorora zvirwere. Izvi zvinowanzo gadzirwa ne micro-injection molding yezvikamu zvega zvega uye wobva wabatanidza uchishandisa gluing kana welding. Kugadzirwa kwe microfluidic devices ne laser ye Ultrafast kune mukana wekugadzira 3D microchannels mukati mezvinhu zvinoonekera zvakaita segirazi pasina chikonzero chekubatanidza. Imwe nzira ndeyekugadzira ultrafast laser mukati megirazi guru richiteverwa ne wet chemical etching, uye imwe ndeye femtosecond laser ablation mukati megirazi kana purasitiki mumvura yakasanganiswa kuti ibvise marara. Imwe nzira ndeyekuisa migero pamusoro pegirazi nekuisa chifukidziro chegirazi kuburikidza ne femtosecond laser welding.
Mufananidzo 6. Femtosecond laser-induced selective etching yekugadzira nzira dze microfluidic mukati mezvinhu zvegirazi
07 Kuboorwa kwemushonga wejekiseni mudiki
Kugadzira michina yeFemtosecond laser microhole machining kwakatsiva micro-EDM kumakambani mazhinji ari mumusika we high-pressure injector nekuda kwekushanduka kukuru mukuchinja ma flow hole profiles uye nguva pfupi dzemachining. Kugona kudzora otomatiki nzvimbo ye focus uye kutsveyama kwe beam kuburikidza ne precessing scan head kwakaita kuti pave ne aperture profiles (semuenzaniso, barrel, flare, convergence, divergence) izvo zvinogona kukurudzira atomization kana kupinda mu combustion chamber. Nguva yekuchera inoenderana nehuwandu hwe ablation, nehukobvu hwe drill hwe 0.2 - 0.5 mm uye dhayamita yegomba ye 0.12 - 0.25 mm, zvichiita kuti nzira iyi ikurumidze kagumi kupfuura micro-EDM. Microdrilling inoitwa muzvikamu zvitatu, kusanganisira roughing uye finishing yema through-pilot holes. Argon inoshandiswa segasi rekubatsira kuchengetedza borehole kubva ku oxidation uye kudzivirira plasma yekupedzisira panguva dzekutanga.
Mufananidzo 7. Kugadziriswa kwakanyatsojeka kwegomba retaper rakapinzwa nefemtosecond laser reinjector yedhiziri
08 Kugadzira magadzirirwo elaser nekukurumidza zvikuru
Mumakore achangopfuura, kuitira kuvandudza kururama kwemuchina, kuderedza kukuvara kwezvinhu, uye kuwedzera kushanda zvakanaka kwemuchina, munda wekugadzira michina midiki wave chinhu chinonyanya kukosheswa nevaongorori. Ultrafast laser ine zvakanakira zvakasiyana-siyana zvekugadzirisa zvakaita sekukuvadzwa kushoma uye kunyatsoita zvinhu nemazvo, izvo zvave chinangwa chekusimudzira kuvandudzwa kwetekinoroji yekugadzira. Panguva imwe chete, ultrafast lasers inogona kushanda pazvinhu zvakasiyana-siyana, uye kukuvara kwezvinhu zvekugadzirisa laser inzira huru yekutsvagisa. Ultrafast laser inoshandiswa kubvisa zvinhu. Kana simba relaser rakakwirira kupfuura chiyero chekubvisa zvinhu, pamusoro pechinhu chakabviswa zvinhu pachacho pacharatidza chimiro che micro-nano chine hunhu hwakati. Tsvagiridzo inoratidza kuti chimiro ichi chakakosha chepamusoro chiitiko chinowanzoitika kana zvinhu zvekugadzirisa laser zvichishandiswa ne laser. Kugadzirira kwezvivakwa zve micro-nano pamusoro kunogona kuvandudza hunhu hwezvinhu pachazvo uye zvakare kugonesa kugadzirwa kwezvinhu zvitsva. Izvi zvinoita kuti kugadzirira zvivakwa zve micro-nano pamusoro ne ultrafast laser ive nzira yehunyanzvi ine kukosha kwakakosha kwekuvandudza. Parizvino, panyaya dzesimbi, tsvakiridzo pamusoro pemagadzirirwo esimbi anokurumidza kushandiswa nelaser inogona kuvandudza hunhu hwesimbi hwekunyorovesa, kuvandudza hunhu hwepamusoro hwekukweshana uye hwekupfeka, kuwedzera kunamira kwejira, uye kuwanda nekunamatira kwemasero munzira.
Mufananidzo 8. Hunhu hwepamusoro pesilicon yakagadzirwa nelaser hunonyanya kutyisa
Senzira yekugadzira tekinoroji yepamusoro-soro, kugadzira laser nekukurumidza kune hunhu hwenzvimbo diki inokanganiswa nekupisa, maitiro asina kurongeka ekudyidzana nezvinhu, uye kugadzirisa kwepamusoro-soro kupfuura muganho we diffraction. Inogona kuita kugadzirwa kwemhando yepamusoro uye kwakanyatsojeka kwezvinhu zvakasiyana-siyana. uye kugadzirwa kwechimiro che micro-nano chemativi matatu. Kugadzira laser yezvinhu zvakakosha, zvivakwa zvakaoma uye zvishandiso zvakakosha kunovhura nzira itsva dzekugadzira micro-nano. Parizvino, femtosecond laser yave ichishandiswa zvakanyanya muminda yakawanda yesainzi yepamusoro-soro: femtosecond laser inogona kushandiswa kugadzirira zvishandiso zvakasiyana-siyana zve optical, senge microlens arrays, bionic compound eyes, optical waveguides uye metasurfaces; ichishandisa kunyatsojeka kwayo, high resolution uye Nekugona kwayo kugadzira kwemativi matatu, femtosecond laser inogona kugadzirira kana kubatanidza microfluidic uye optofluidic chips senge microheater components uye three-dimensional microfluidic channels; Pamusoro pezvo, femtosecond laser inogonawo kugadzirira mhando dzakasiyana dzema micro-nanostructures epamusoro kuti iwane anti-reflection, anti-reflection, super-hydrophobic, anti-icing nemamwe mabasa; kwete izvozvo chete, femtosecond laser yakashandiswawo mumunda we biomedicine, ichiratidza kushanda kwakanaka muminda yakadai se biological micro-stents, cell culture substrates uye biological microscopic imaging. Tarisiro huru yekushandisa. Parizvino, minda yekushandisa ye femtosecond laser processing iri kuwedzera gore negore. Kuwedzera kune micro-optics, microfluidics, multi-functional micro-nanostructures uye biomedical engineering applications, inoitawo basa guru mune dzimwe minda dziri kubuda, dzakadai sekugadzirira metasurface. , kugadzira micro-nano uye multi-dimensional optical information storage, nezvimwewo.
Nguva yekutumira: Kubvumbi-17-2024
