Nheyo, mhando uye mashandisirwo ekuchenesa nelasertekinoroji
Tekinoroji yekuchenesa nelaser inobudirira kushandisa tekinoroji yelaser mumunda weinjiniya. Musimboti wayo mukuru ndewekushandisa simba rakawanda relaser kuti rishande pamwe chete nezvinhu zvinonamatira pasi pechinhu chebasa, zvichiita kuti zviparadzane nepasi pevhu nenzira yekuwedzera kupisa, kunyunguduka, uye kupwanyika kwegasi. Tekinoroji yekuchenesa nelaser inoratidzwa nekushanda zvakanaka, hushamwari kune nharaunda, uye kuchengetedza simba. Yakashanda zvinobudirira muminda yakaita sekuchenesa matai emould, kubvisa pendi yemuviri wendege, uye kugadzirisa tsika.
Tekinoroji dzechinyakare dzekuchenesa dzinosanganisirakuchenesa kwemakanika(kuchenesa jecha, kuchenesa mvura ine simba rakawanda, nezvimwewo), kuchenesa ngura yemakemikari, kuchenesa ne ultrasonic, kuchenesa chando chakaoma, nezvimwewo. Aya matekinoroji ekuchenesa ave achishandiswa zvakanyanya mumaindasitiri akasiyana-siyana. Semuenzaniso, kuchenesa jecha kunogona kubvisa mavanga engura yesimbi, maburi esimbi, uye varnish ine proof three-proof pamabhodhi edunhu nekusarudza mabrasives akaomarara akasiyana. Tekinoroji yekuchenesa ngura yemakemikari inoshandiswa zvakanyanya mukuchenesa mavara emafuta pamusoro pemidziyo, zviyero mumaboiler, uye mapaipi emafuta. Kunyangwe matekinoroji aya ekuchenesa akagadzirwa zvakanaka, achiri nematambudziko. Semuenzaniso, kuchenesa jecha kunogona kukonzera kukuvara panzvimbo yakagadziriswa, uye kuchenesa ngura yemakemikari kunogona kukonzera kusvibiswa kwezvakatipoteredza uye ngura pamusoro penzvimbo yakacheneswa kana ikasabatwa nemazvo. Kubuda kwetekinoroji yekuchenesa ne laser kunomiririra shanduko mutekinoroji yekuchenesa. Inoshandisa simba rakawanda, kunyatsojeka, uye kutapurirana kwakanaka kwesimba re laser, uye ine mabhenefiti ari pachena pane matekinoroji ekuchenesa echinyakare maererano nekushanda zvakanaka kwekuchenesa, kunyatsojeka kwekuchenesa, uye nzvimbo yekuchenesa. Inogona kudzivirira kusvibiswa kwezvakatipoteredza kunokonzerwa nekuchenesa ngura yemakemikari nedzimwe tekinoroji dzekuchenesa, uye haizokonzere kukuvara kwe substrate.
Iyomusimboti wekuchenesa ne laser
Saka chii chinonzi kuchenesa nelaser? Kuchenesa nelaser inzira inoshandiswa nelaser beam kubvisa zvinhu kubva pamusoro pechinhu chakasimba (kana dzimwe nguva mvura). Pakuyerera kwelaser yakaderera, zvinhu zvinopiswa nesimba relaser rinonyungudika uye zvinopera kana kunyungudika. Pakuyerera kwelaser yakakwira, zvinhu zvinowanzo shanduka kuita plasma. Kazhinji, kuchenesa nelaser zvinoreva kubvisa zvinhu uchishandisa pulsed lasers, asi kana simba relaser rakakwirira zvakakwana, danda relaser rinoenderera mberi rinogona kushandiswa kubvisa zvinhu. Excimer laser yechiedza chakadzika che ultraviolet inonyanya kushandiswa pakubvisa optical. Wavelength yelaser inoshandiswa pakubvisa optical inenge 200nm. Kudzika kwekunyudzwa kwesimba relaser nehuwandu hwezvinhu zvinobviswa nelaser pulse imwe chete zvinoenderana nehunhu hweoptical hwezvinhu, pamwe newavelength yelaser nehurefu hwepulse. Huremu hwese hunobviswa kubva pane chinangwa nelaser pulse yega yega inowanzonzi ablation rate. Kumhanya kwescanning yelaser beam uye kufukidza kwemutsara wescanning, nezvimwewo, zvichakanganisa zvakanyanya maitiro ekubvisa.
Mhando dzeTekinoroji yekuchenesa Laser
1) Kuchenesa neLaser dry cleaning: Kuchenesa neLaser dry laser zvinoreva kupiswa kwakananga kwechinhu chekuchenesa ne pulsed laser, zvichiita kuti tsvina yebase kana pamusoro itore simba uye iwedzere kupisa, zvichikonzera kuwedzera kwekupisa kana kuti kupisa kwebase, zvichiparadzanisa zviviri izvi. Nzira iyi inogona kukamurwa kuita mamiriro maviri: imwe ndeyekuti tsvina yesurface inotora simba relaser uye inowedzera; imwe ndeyekuti base inotora simba relaser uye inogadzira kupisa. Muna 1969, SM Bedair nevamwe vakaona kuti nzira dzakasiyana-siyana dzekurapa pamusoro dzakadai sekupisa, makemikari, uye sandblasting cleaning zvese zvine matambudziko akasiyana. Panguva imwe chete, kuwanda kwesimba mushure me laser kunogona kuita kuti chiitiko chekubuda kwemvura pamusoro pezvinhu zvikwanisike, izvo zvinoita kuti pave nekugona kuchenesa pamusoro pezvinhu zvisingaparadze. Kuburikidza nekuyedza, zvakaonekwa kuti kushandisa ruby Q-switched laser ine simba re30 MW/cm2 kunogona kucheneswa kwe silicon material surface density pasina kukuvadza base, uye kekutanga, kuchenesa neLaser dry yets surface density kwakaitwa. Mwero wose unogona kuratidzwa nekuwanda kwekubviswa kwezvidimbu zvefirimu, sezvinotevera:
Mufomura, ε inomiririra laser pulse energy index, h inomiririra ukobvu hwechikamu chefirimu rinosvibisa, uye E inomiririra elastic modulus index yechikamu chefirimu.
2) Kuchenesa NeLaser Wet: Basa risati racheneswa raiswa palaser inoputika, firimu remvura rinoiswa pamusoro risati raiswa. Pasi pekushanda kwelaser, tembiricha yefirimu remvura inokwira nekukurumidza uye inopfava. Panguva yekupfava, wave yeimpact inogadzirwa, iyo inoshanda pazvidimbu zvinosvibisa uye inoita kuti zvibve pasubstrate. Nzira iyi inoda kuti substrate nefirimu remvura zvisabatane, nokudaro zvichideredza huwandu hwezvinhu zvinoshanda. Muna 1991, K. Imen nevamwe vake vakagadzirisa dambudziko rezvinhu zvinosvibisa zve sub-micron pamusoro pe semiconductor wafers nezvinhu zvesimbi mushure mekushandiswa kwenzira dzechinyakare dzekuchenesa, uye vakadzidza kushandiswa kwekuputira firimu pamusoro pesubstrate yezvinhu zvinogona kunyudza simba re laser zvinobudirira. Zvadaro, vachishandisa CO2 laser, firimu rakanyudza simba re laser uye nekukurumidza rakawedzera tembiricha uye rakafashaira, richigadzira vaporization inoputika, iyo yakabvisa tsvina kubva pamusoro pesubstrate. Iyi nzira yekuchenesa inonzi laser wet cleaning.
3) Kuchenesa Mafungu Eropa NeLaser: Mafungu eropa neLaser anogadzirwa kana laser yavhenekera mhepo uye ichiita kuti paumbwe mafungu eropa neLaser. Mafungu eropa neLaser anoshanda pamusoro pechinhu chebasa kuti chicheneswe uye anoburitsa simba rekubvisa tsvina. Laser haishande pamusoro pechinhu, nokudaro isingakanganise chinhu. Tekinoroji yekuchenesa mafungu eropa neLaser inogona kuchenesa zvidimbu zvine dhayamita yemakumi akati wandei e nanometers, uye hapana zvirambidzo pawavelength yelaser. Nheyo yepanyama yekuchenesa plasma inogona kupfupikiswa seinotevera: a) Beam relaser rinoburitswa nelaser rinonyudzwa nelayer iri pamusoro pemvura yakarapwa. b) Huwandu hwakawanda hwekunyudzwa hunogadzira plasma iri kukura nekukurumidza (gasi risina kugadzikana rakawanda) uye rinogadzira wave yemvura. c) Mafungu emvura anokonzera kusvibiswa kupatsanuka uye kubviswa. d) Upamhi hwemhepo yemhepo yechiedza hunofanira kunge hwakapfupika zvakakwana kudzivirira kuungana kwemhepo kunogona kukuvadza pamusoro pemvura yakarapwa. e) Kuedza kwakaratidza kuti kana paine ma oxide pamusoro pesimbi, plasma inogadzirwa pamusoro pesimbi. Plasma inongogadzirwa chete kana huwandu hwesimba huchipfuura muganho, zvinoenderana nechikamu chakabviswa chetsvina kana oxide layer. Muganho uyu wakakosha zvikuru pakuchenesa zvinobudirira uku uchivimbisa kuchengetedzeka kwechinhu chesubstrate. Kuonekwa kweplasma kunewo muganho wechipiri. Kana huwandu hwesimba huchipfuura muganho uyu, chinhu chesubstrate chichakuvara. Kuti uite kuchenesa zvinobudirira uku uchivimbisa kuchengetedzeka kwechinhu chesubstrate, maparamita elaser anofanirwa kugadziriswa zvichienderana nemamiriro ezvinhu kuti ave nechokwadi chekuti huwandu hwesimba rechiedza che light pulse huri pakati pemiganho miviri. Muna 2001, JM Lee nevamwe vake vakashandisa hunhu hwekuti malaser ane simba guru anogadzira mafungu eplasma shock kana akatarisana, uye vakashandisa pulse laser ine simba re 2.0 J/cm2 (yakakwirira kupfuura muganho wekukuvara kwema silicon wafers) kuti ivhenekere zvakaenzana nesilicon wafer, vachibudirira kuchenesa 1 μm tungsten particles dzakanyudzwa pamusoro pesilicon wafer. Nzira iyi yekuchenesa inonzi laser plasma shock wave cleaning, uye kutaura chokwadi, laser plasma shock wave cleaning rudzi rwekuchenesa kwelaser yakaoma. Chinangwa chekutanga chehunyanzvi hwekuchenesa nelaser nhatu idzi kwaive kuchenesa zvidimbu zvidiki pamusoro pemawafer e semiconductor. Zvinogona kutaurwa kuti tekinoroji yekuchenesa nelaser yakatanga nekuvandudzwa kwetekinoroji ye semiconductor. Zvisinei, tekinoroji yekuchenesa nelaser yagara ichishandiswa kune dzimwe nzvimbo, dzakadai sekuchenesa matai emould, kubvisa pendi yeganda rendege, uye kugadzirisa pamusoro pezvinhu zvakagadzirwa. Paunenge uri pasi pemwaranzi yelaser, gasi risina simba rinogona kufefeterwa pamusoro pe substrate. Kana tsvina yabviswa pamusoro, ichafefeterwa ipapo ipapo negasi kudzivirira kusvibiswa zvakare uye oxidation yepamusoro.
Iyokushandiswa kwetekinoroji yekuchenesa nelaser
1) Mumunda we semiconductor, kucheneswa kwema semiconductor wafers nema optical substrates kunosanganisira maitiro akafanana, ayo ari ekugadzirisa zvinhu zvakagadzirwa kuita maumbirwo anodiwa kuburikidza nekucheka, kukuya, nezvimwewo. Munguva iyi, particulate contaminants inounzwa, iyo yakaoma kubvisa uye inokonzera matambudziko akakomba ekusvibiswa kakawanda. Zvinosvibisa pamusoro pema semiconductor wafers zvinogona kukanganisa mhando ye circuit board printing, nokudaro zvichipfupisa hupenyu hwema semiconductor chips. Zvinosvibisa pamusoro pema optical substrates zvinogona kukanganisa mhando ye optical devices nema coatings, uye zvinogona kutungamira mukugoverwa kwesimba kusina kuenzana, zvichipfupisa hupenyu hwese. Sezvo laser dry cleaning ichikonzera kukuvara pamusoro pe substrate, nzira iyi yekuchenesa haishandiswi zvakanyanya mukuchenesa ma semiconductor wafers nema optical substrates. Laser wet cleaning uye laser plasma shock wave cleaning zvine mashandisirwo anobudirira mumunda uyu. Xu Chuanyi nevamwe vake vakadzidza kuiswa kwe micro-scale special magnetic paint pamusoro pe ultra-smooth optical substrates se dielectric film, uye vakazoshandisa pulsed laser yekuchenesa. Mhedzisiro yekuchenesa yaive yakanaka, kunyangwe huwandu hwezvimedu zvisina kuchena panzvimbo imwe neimwe hwakawedzera, saizi nenzvimbo yekufukidza zvimedu zvisina kuchena zvakaderedzwa zvakanyanya. Nzira iyi inogona kuchenesa zvinobudirira zvimedu zvisina kuchena zviri pamusoro pezvinhu zvinopenya zvakanyanya. Zhang Ping akadzidza simba rekushanda nesimba relaser pamhedzisiro yekuchenesa kwezvimedu zvakasiyana-siyana zvehukuru hwezvimedu mu tekinoroji yekuchenesa nelaser plasma. Mhedzisiro yekuedza yakaratidza kuti kune zvimedu zvepolystyrene zviri pazvimedu zvegirazi zvinofambisa mhepo, daro rakakodzera rekushanda re240 mJ raive 1.90 mm. Sezvo simba relaser rakawedzera, mhedzisiro yekuchenesa yakavandudzika zvakanyanya, uye zvimedu zvakakura zvaive nyore kuchenesa.
2) Mumunda wezvinhu zvesimbi, kucheneswa kwenzvimbo dzesimbi kwakasiyana nekucheneswa kwe semiconductor wafers uye optical substrates. Zvinhu zvinosvibisa zvinofanira kucheneswa ndezvechikamu che macroscopic. Zvinhu zvinosvibisa pamusoro pezvinhu zvesimbi zvinonyanya kusanganisira oxide layer (rust layer), pendi layer, coating, nezvimwe zvinobatanidzwa, uye zvinogona kupatsanurwa muzvikamu zve organic contaminants (senge pendi layer, coating) uye inorganic contaminants (senge rust layer). Kucheneswa kwenzvimbo dzesimbi contaminants pamusoro kunonyanya kuzadzisa zvinodiwa zvekugadzirisa kana kushandisa zvinotevera, zvakaita sekubvisa inenge 10 μm ye oxide layer kubva pamusoro pezvikamu zve titanium alloy usati wabatanidza, kubvisa pendi yepakutanga pamusoro peganda panguva yekugadzirisa kukuru mundege kuti zvive nyore kupfapfaidza zvakare, uye kugara uchichenesa zvidimbu zverabha zvakabatana nerubber tire mold kuti uve nechokwadi chekuchena kwenzvimbo uye kunaka uye hupenyu hwemold. Muganho wekukuvadzwa kwezvinhu zvesimbi wakakwira kupfuura muganho wekuchenesa zvinhu zvinosvibisa pamusoro. Nekusarudza power laser yakakodzera, mhedzisiro iri nani yekuchenesa inogona kuwanikwa. Tekinoroji iyi yakashandiswa zvakanyanya mune dzimwe nzvimbo. Wang Lihua nevamwe vake vakadzidza kushandiswa kwetekinoroji yekuchenesa nelaser mukurapa ganda re oxide pamusoro pe aluminum alloys ne titanium alloys. Zvakabuda muongororo iyi zvakaratidza kuti kushandisa laser ine simba re 5.1 J/cm2 kunogona kuchenesa oxide layer pamusoro pe A5083-111H aluminum alloy uku uchichengetedza mhando yakanaka ye substrate, uye kushandisa pulsed laser ine avhareji yesimba re 100 W nenzira yekuskena kunogona kuchenesa zvinobudirira oxide layer pamusoro pe titanium alloys uye kuvandudza kuoma kwenzvimbo yacho. Makambani emumba akadai saRuike Laser, Daqu Laser, naShenzhen Chuangxin akagadzira michina yekuchenesa nelaser yakashandiswa zvakanyanya pakuchenesa rabha molds dzakadai sematairi, simbi ngura layers, uye mafuta stains pamusoro pezvikamu.
3) Munyaya yezvisaririra zvetsika, kucheneswa kwezvisaririra zvesimbi nematombo uye pamusoro pemapepa kwakakosha kubvisa tsvina dzakadai setsvina neinki zvinoonekwa pamusoro pazvo nekuda kwenhoroondo yazvo refu. Zvisaririra izvi zvinoda kubviswa kuti zvisaririra zvidzore. Pamabasa epepa akadai sekunyora mifananidzo nekupenda, kana zvikachengetwa zvisina kunaka, chakuvhuvhu chinokura pamusoro pazvo uye chinoita mavanga. Mavanga aya anokanganisa zvakanyanya chitarisiko chepakutanga chepepa, kunyanya pamapepa ane kukosha kukuru kwetsika kana nhoroondo, izvo zvinokanganisa kukosha kwayo nekuchengetedzwa kwayo. Zhao Ying nevamwe vake vakadzidza nezvekushandisa ultraviolet laser kuchenesa mavanga echivhuvhu pamapepa. Mhedzisiro yekuyedza yakaratidza kuti kushandisa laser ine simba re3.2 J/mm2 kuskena kamwe chete kunogona kubvisa mavanga matete, uye kuskena kaviri kunogona kubvisa mavanga acho zvachose. Zvisinei, kana simba relaser rinoshandiswa rakawandisa, richakuvadza pepa rekuskena uku richibvisa mavanga acho. Zhang Xiaotong nevamwe vake vakabudirira kugadzirisa dombo rebronze rakaiswa negoridhe vachishandisa nzira yelaser vertical irradiation liquid film. Zhang Licheng nevamwe vake. Vakashandisa tekinoroji yekuchenesa nelaser mukudzoreredza chifananidzo chehari chevakadzi chakavezwa neHan Dynasty. Yuan Xiaodong nevamwe vake vakadzidza mhedzisiro ye tekinoroji yekuchenesa nelaser mukucheneswa kwematombo akasiyiwa uye vakaenzanisa kukuvara kwemuviri wejecha usati wacheneswa uye mushure mekucheneswa, pamwe chete nemigumisiro yekuchenesa kwemavara einki, kusvibiswa kweutsi, uye kusvibiswa kwependi.
Mhedziso: Tekinoroji yekuchenesa laser inzira yepamusoro-soro, ine tsvakiridzo yakakura uye mikana yekushandisa munzvimbo dzakarurama dzakadai sedzemuchadenga, zvishandiso zvemauto, uye mainjiniya emagetsi nemagetsi. Parizvino, tekinoroji yekuchenesa laser yakashandiswa zvinobudirira mune dzimwe nzvimbo, nekuda kwekushanda kwayo kwakanaka, kusina njodzi kune zvakatipoteredza, uye kushanda zvakanaka kwekuchenesa. Nzvimbo dzayo dzekushandisa dziri kuwedzera zvishoma nezvishoma. Kuvandudzwa kwetekinoroji yekuchenesa laser hakuna kungoshandiswa chete munzvimbo dzakadai sekubvisa pendi nekubvisa ngura, asiwo kwave nemishumo yekushandisa laser kuchenesa oxide layer pawaya dzesimbi mumakore achangopfuura. Kuwedzera kweminda yekushandiswa iripo uye kukura kweminda mitsva ndiyo hwaro hwekuvandudzwa kwetekinoroji yekuchenesa laser. Tsvagiridzo nekuvandudzwa kwemidziyo mitsva yekuchenesa laser uye kukura kwemidziyo mitsva yekuchenesa laser zvicharatidza musiyano, zvichikonzera mabasa akasiyana-siyana. Mune ramangwana, kuwana kuchenesa laser otomatiki zvizere kuburikidza nekushandira pamwe nemarobhoti eindasitiri kunogonawo kuitika. Mafambiro ekuvandudza kwetekinoroji yekuchenesa laser ndeaya anotevera:
(1) Kusimbisa tsvakiridzo pamusoro pedzidziso yekuchenesa nelaser kuti itungamirire mashandisirwo ehunyanzvi hwekuchenesa nelaser. Mushure mekuongorora magwaro akawanda, zvakaonekwa kuti hapana hurongwa hwedzidziso hwakakura hunotsigira tekinoroji yekuchenesa nelaser, uye zvidzidzo zvakawanda zvakavakirwa pakuedza. Kugadzira hurongwa hwedzidziso yekuchenesa nelaser ndiyo hwaro hwekuvandudzwa nekukura kwetekinoroji yekuchenesa nelaser.
(2) Kuwedzera kweminda iripo yekushandisa uye minda mitsva yekushandisa. Tekinoroji yekuchenesa nelaser yakashandiswa zvinobudirira munzvimbo dzakadai sekubvisa pendi nekubvisa ngura, uye kwave nemishumo yekushandisa nelaser kuchenesa oxide layer pawaya dzesimbi mumakore achangopfuura. Kuwedzera kweminda iripo yekushandisa uye kukura kweminda mitsva ivhu rakaorera rekuvandudza tekinoroji yekuchenesa nelaser.
(3) Kutsvagurudza nekugadzira michina mitsva yekuchenesa nelaser. Kugadzirwa kwemichina mitsva yekuchenesa nelaser kucharatidza musiyano. Rudzi rumwe midziyo ine hunhu hwakasiyana-siyana hunofukidza nzvimbo dzakasiyana siyana dzekushandisa, senge mudziyo mumwe chete unogona kubvisa pendi panguva imwe chete uye kubvisa ngura. Rumwe rudzi midziyo yakasarudzika yezvinodiwa chaizvo, senge kugadzira zvishandiso zvakananga kana mafiber ekuona kuti awane basa rekuchenesa tsvina munzvimbo diki. Kuburikidza nekushandira pamwe nemarobhoti eindasitiri, kuchenesa nelaser otomatiki zvizere inzira inozivikanwa yekushandisa.
Nguva yekutumira: Chikunguru-17-2025
