Tekinoroji yekuchenesa nelaseribasa rakabudirira rekushandisa tekinoroji yelaser mumunda weinjiniya. Musimboti wayo wekutanga unoshandisa simba rakawanda remalaser kuti zvigone kushanda pamwe chete pakati pemaranzi elaser nezvinosvibisa zvinonamatira kumidziyo yebasa. Zvinosvibisa zvinoparadzaniswa kubva kumidziyo kuburikidza nekuwedzera kupisa nekukurumidza, kunyunguduka, gasi rinoputika uye dzimwe nzira. Iine kushanda kwakasimba, hushamwari kune nharaunda uye kuchengetedza simba, tekinoroji yekuchenesa laser yakashandiswa zvinobudirira mukuchenesa matai emould, kubvisa pendi yemuviri wendege, kugadzirisa zvisaririra zvetsika nedzimwe nzvimbo.
Matekinoroji echinyakare ekuchenesa anosanganisira kuchenesa nekukweshana kwemagetsi (kuputira jecha, kuchenesa jeti yemvura ine simba rakawanda, nezvimwewo), kuchenesa ngura yemakemikari, kuchenesa ne ultrasonic, kuchenesa chando chakaoma nezvimwewo. Matekinoroji aya anoshandiswa zvakanyanya mumaindasitiri akasiyana-siyana. Semuenzaniso, kuputira jecha kunogona kubvisa mavanga engura esimbi, maburi epamusoro uye machira e conformal pabhodhi redunhu nekusarudza ma abrasives akaomarara akasiyana. Kuchenesa ngura yemakemikari kunoshandiswa zvakanyanya pakubvisa mafuta epamusoro emidziyo, kuchenesa boiler scale uye kuvhura mapaipi emafuta. Kunyange zvazvo yakura, nzira dzechinyakare dzine matambudziko makuru: kuputira jecha kunokuvadza nzvimbo dzakagadziriswa, uye kuchenesa ngura yemakemikari kunokonzera kusvibiswa kwenharaunda uye kunogona kukanganisa substrates kana ikasashandiswa zvisizvo. Kubuda kwekuchenesa ne laser kunoratidza shanduko muhunyanzvi hwekuchenesa. Kushandisa simba rakawanda re lasers, kunyatsojeka uye kutumirwa zvinobudirira, kuchenesa ne laser kunopfuura nzira dzechinyakare mukuchenesa zvinobudirira, kunyatsojeka uye nzvimbo. Kunobvisa kusvibiswa kwenharaunda kubva pakuchenesa nemakemikari uye hakukanganisi substrates.
Nheyo dzeKuchenesa neLaser
Chii chaizvo chinonzi kuchenesa nelaser? Zvinoreva nzira yekubvisa zvinhu kubva panzvimbo dzakaoma (kana dzimwe nguva dzine mvura) kuburikidza nemwaranzi yelaser beam. Pakuyerera kwelaser kwakaderera, simba relaser rinonyungudutswa rinopisa zvinhu, zvichikonzera kupwanyika kana sublimation. Pakuyerera kwelaser kwakakwira, zvinhu zvinowanzo shanduka kuita plasma. Kuchenesa nelaser kunowanzo shandisa pulsed lasers kubvisa zvinhu, kunyange zvazvo matanda elaser anoenderera mberi anogona kubvisa zvinhu nesimba rakakwana. Malaser e deep ultraviolet excimer, ane marefu ewavelengths angangoita 200 nm, anonyanya kushandiswa pakugadzira photoablation.
Kudzika kwesimba relaserKunyudzwa kwemvura uye huwandu hwezvinhu zvinobviswa pakurova kwemhepo zvinoenderana nehunhu hwezvinhu, pamwe nehukuru hwemafungu elaser uye nguva yekurova kwemhepo. Huwandu hwese hunobviswa kubva pane chinangwa pakurova kwemhepo hunotsanangurwa sehuwandu hwekubvisa kwemvura. Hunhu hwemwaranzi yelaser hwakadai sekumhanya kwekuongorora uye kufukidza kwemutsara zvinopesvedzera zvakanyanya maitiro ekubvisa kwemvura.
Mhando dzeTekinoroji yekuchenesa Laser
1) Kuchenesa neLaser Dry
Kuchenesa ne laser dry kunosanganisirakupenya kwakananga kwezvishandiso zvebasa uchishandisa laser. Zvinosvibisa kana kuti substrates zvinotora simba relaser, zvichikwidza tembiricha yazvo uye zvichikonzera kuwedzera kwekupisa kana kuti substrate thermal vibration, izvo zvinoparadzanisa zvinosvibisa kubva kune substrates. Izvi zvinoitika muzviitiko zviviri: zvinosvibisa pamusoro zvinotora simba relaser zvowedzera, kana substrates zvinotora simba zvodedera nekupisa.
Muna 1969, SM Bedair nevamwe vake vakaona kuti kurapwa kwepasi (kupisa, ngura yemakemikari, sandblasting) zvese zvaive nemiganhu. Vakaona kuti kuwanda kwesimba rema laser akatarisana kunogona kupfungaira zvinhu zvepasi pasina kukuvadza substrates. Kuedza kwakasimbisa kuti Q-switched ruby laser ine simba re30 MW/cm² inogona kuchenesa tsvina kubva pamusoro pesilicon pasina kukuvara kwe substrate, zvichiratidza kutanga kwekushandiswa kwe laser dry cleaning.
Mwero wekuchenesa unogona kuratidzwa kuburikidza nehuwandu hwekubviswa kwemarara emafirimu, sezvinoratidzwa pazasi:
(Foramu: ε—laser pulse energy index; h—contaminant film thickness index; E—film elastic modulus index)
2) Kuchenesa NeLaser Nemvura
Pamberi pekupiswa nemwaranzi nelaser, firimu remvura rinoputirwa pamusoro pebasa. Simba relaser rinopisa nekukasika uye rinoita kuti firimu rive neutsi, zvichiita kuti pave ne "shockwave" inobvisa tsvina kubva mu "substrate". Nzira iyi haidi makemikari pakati pe "substrate" nefirimu remvura, zvichiita kuti zvinhu zvayo zvisashande.
Muna 1991, K. Imen nevamwe vake vakaongorora zvakasara zve submicron zvinosvibisa pa semiconductor wafers nesimbi mushure mekucheneswa kwakajairika. Vakaputira substrates ne laser-absorbent film ndokuzvivhenekesa ne CO₂ laser. Firimu racho rakatora simba, rakapiswa nekukurumidza, rakafashaira uye rakapiswa nemhepo inoputika, richibvisa tsvina pamusoro—izvi zvinotsanangura laser wet cleansing.
3) Kuchenesa neLaser Plasma Shockwave
Mafungu eplasma eLaser anoumbwa kana malaser aiisa mweya muplasma shockwaves yakatenderera panguva yekuvhenekerwa. Mafungu aya anorova ma substrates, achiburitsa simba rekubvisa tsvina pasina kukuvadza substrate (malaser haashande zvakananga nema substrates). Iyi tekinoroji inochenesa zvidimbu zvidiki semakumi e nanometers uye haiisi zvirambidzo pawavelength yelaser.
Nheyo dzemuviri dzekuchenesa plasma dzakapfupikiswa seizvi:
a) Matanda eLaser anotorwa nechikamu chinosvibisa chiri pamusoro pechinhu chaunoda.
b) Kunyudzwa kwesimba rakawanda kunogadzira plasma iri kukura nekukurumidza (gasi risina kugadzikana rine ion yakawanda), zvichikonzera mafungu eropa.
c) Mafungu emvura anopwanya-pwanya obvisa tsvina.
d) Mapundu eLaser anofanira kunge ari mapfupi zvakakwana kudzivirira kuungana kwekupisa kunokuvadza substrate.
e) Kuedza kunoratidza maumbirwo eplasma pamusoro pesimbi kana paine ma oxides.
Kugadzirwa kweplasma kunoitika chete pamusoro pechiyero chesimba, izvo zvinoenderana nechinhu chakasvibiswa kana kuti oxide layer chinofanira kubviswa. Chikamu chechipiri chakakwirira chiripo, kupfuura icho chikamu chepasi chinokuvadzwa. Kuti ive nechokwadi chekuchenesa kwakanaka pasina kukuvara kwechikamu chepasi, ma parameter e laser anofanirwa kugadziriswa kuti simba rekurova kwemoyo rirambe riri pakati pezvikamu zviviri.
Muna 2001, JM Lee nevamwe vake vakashandisa ma "plasma shockwaves" kubva kuma "high-power focused lasers". "Pulsed laser" ine simba re 2.0 J/cm² (rinopfuura muganhu wekukuvara kwesilicon) yakavhenekesa ma "silicon wafers" zvakafanana, ichibvisa 1 μm tungsten particles. Kutaura chokwadi, "laser plasma shockwave cleansing" chikamu che "dry cleaning".
Pakutanga yakagadzirwa kubvisa zvidimbu zvidiki kubva kuma wafer e semiconductor, matekinoroji matatu aya ekuchenesa ne laser akawedzera kusvika pakuchenesa matayi emould, kubvisa pendi yeganda mundege, kugadzirisa zvisaririra zvetsika nezvimwe. Gasi risina simba rinogona kufuridzwa pamidziyo panguva yekupiswa ne laser kuti ribvise ipapo ipapo tsvina yakabviswa, kudzivirira kusvibiswa uye oxidation.
Mashandisirwo eTekinoroji yekuchenesa neLaser
1) Indasitiri yeSemiconductor: Kuchenesa maSemiconductor Wafers neOptical Substrates
Mawafer eSemiconductor uye maoptical substrates anogadzirwa zvakafanana (kucheka, kukuya) kuti agadzire maumbirwo anodiwa, zvichiunza tunhu twakasvibiswa twakaoma kubvisa uye tunowanzo svibiswa. Utachiona huri pamawafer hunokanganisa kunaka kwekudhinda kwedunhu uye hupfupisa hupenyu hwemachip. Pamaoptical substrates, anoderedza mashandiro eoptical device uye coating, zvichikonzera kugoverwa kwesimba kusina kuenzana uye hupenyu hwebasa hushoma.
Kuchenesa neLaser dry hakuwanzo shandiswa pano nekuda kwenjodzi dzekukuvadzwa nesubstrate, nepo kuchenesa ne wet cleaning uye plasma shockwave cleaning zvine mashandisirwo akawanda anobudirira. Xu Chuanyi nevamwe vake vakaisa pendi yemagineti ye micron-scale se dielectric film pa ultra-smooth optical substrates, zvichiita kuti kucheneswa kwe laser kwakapfungaira kubudirire. Kunyangwe zvikamu zvese zvekusachena zvakawedzera, saizi yazvo nekufukidza kwadzo kwakadzikira zvakanyanya. Zhang Ping akadzidza mhedzisiro yekushanda kure nesimba re laser pakushanda zvakanaka kwezvikamu zvehukuru hwakasiyana. Kuedza kwakaratidza kuti laser ye 240 mJ yakawana kucheneswa kwakanakisa kwezvikamu zve polystyrene pagirazi rinofambisa mvura padaro rekushanda re 1.90 mm. Kushanda zvakanaka kwekuchenesa kwakavandudzika nesimba re laser rakawanda, uye zvikamu zvikuru zvaive nyore kubvisa.
2) Indasitiri yeSimbi: Kuchenesa Pamusoro peSimbi
Kuchenesa pamusoro pesimbi kunotarisa zvinhu zvinosvibisa zvikuru: zvidimbu zveoxide/ngura, pendi, machira nezvimwe zvinonamirwa, zvakarongwa sezvinhu zvinosvibisa zveorganic (pendi, machira) kana zvinhu zvisina organic (ngura). Kuchenesa kunosangana nezvinodiwa zvekugadzirisa/kushandisa zvinotevera: semuenzaniso, kubvisa zvidimbu zveoxide zvine ukobvu hwe10 μm kubva mu titanium alloys usati wabatanidza, kubvisa pendi kubva pamatehwe endege kuti ipendwezve, uye kuchenesa rabha kubva muzviumbwa zvemataira kuti ive nechokwadi chekuti chigadzirwa chacho chine hutano uye hupenyu hwechiumbwa.
Simbi dzine mwero wekukuvadzwa wakakwira kupfuura mwero wekucheneswa kwadzo une tsvina, zvichiita kuti dzicheneswe zvinobudirira nemalaser ane simba rakakodzera. Mashandisirwo akajairika anosanganisira: Wang Lihua nevamwe vake vakaratidza kuti laser ye5.1 J/cm² yakabvisa oxide layers kubva kuA5083-111H aluminum alloy uku ichichengetedza hunhu hwesubstrate, uye laser ye100 W pulsed yakachenesa titanium alloy oxide layers uye yakawedzera kuomarara kwenzvimbo. Vagadziri vemumba (Raycus Laser, Han's Laser, Shenzhen Chuangxin) vanopa zvakanyanya michina yekuchenesa laser yerabha molds, ngura yesimbi uye kubviswa kwemafuta.
3) Kuchengetedza Zvisaririra zvetsika: Kuchenesa Zvisaririra zvetsika neMapepa
Zvisaririra zvetsika zvesimbi nematombo zvinounganidza tsvina, mavara einki nezvimwe zvinosvibisa nekufamba kwenguva, zvichida kubviswa kuti zvidzore chitarisiko chepakutanga. Zvinhu zvemapepa (mifananidzo, manyorerwo) zvinokura nemota uye maplaque panguva yekuchengetwa kusina kunaka, zvichikanganisa zvakanyanya mamiriro azvo uye kukosha kwetsika/nhoroondo.
Zhao Ying nevamwe vake vakaongorora kucheneswa kweUV nelaser yemold plaques papepa remupunga: scan imwe chete pa3.2 J/mm² yakabvisa ma plaques matete, nepo scan mbiri dzakabvisa zvachose; simba rakawanda relaser rakakuvadza bepa racho. Zhang Xiaotong akabudirira kugadzirisa chinhu chebronze chakashongedzwa negoridhe achishandisa nzira ye laser wet. Zhang Licheng akashandisa laser kuchenesa pamufananidzo wechikadzi wehari wakapendwa kubva kuHan Dynasty. Yuan Xiaodong nevamwe vake vakaongorora kushanda kwekuchenesa nelaser yematombo akasara, vachienzanisa kukuvara kwe substrate uye kushanda kwekubvisa inki, utsi uye mavara ependi pajecha.
Mhedziso
Kuchenesa nelaser tekinoroji yepamusoro ine mikana yakawanda yekutsvaga nekushandisa mundege, zvishandiso zvemauto, zvemagetsi nedzimwe nzvimbo dzakarongeka. Yakakura mumaindasitiri akasiyana-siyana nekuda kwekushanda kwayo zvakanaka, hushamwari kune zvakatipoteredza uye mhedzisiro yekuchenesa kwepamusoro, mashandisirwo ayo ari kuramba achikura. Kunze kwekubvisa pendi nengura, kufambira mberi kwazvino kunosanganisira kuchenesa nelaser oxide layers pawaya dzesimbi. Kubudirira mune ramangwana kunoenderana nekuwedzera mashandisirwo aripo, kupinda muminda mitsva uye kugadzira michina mitsva:
- Simbisa tsvakurudzo yedzidziso kuti itungamirire mashandisirwo anoshanda. Tsvagiridzo iripo inovimba zvakanyanya nekuyedza, isina hurongwa hwedzidziso hwakakura. Kugadzira hurongwa hwakadaro kwakakosha pakukura kwetekinoroji.
- Wedzera mashandisirwo muminda iripo nemitsva. Yakura mukubvisa pendi/ngura, mashandisirwo ari kuenderera mberi anosanganisira kuchenesa simbi, zvichipa nzvimbo yakaorera yekukura.
- Gadzira michina mitsva yekuchenesa nelaser, ichisiyana-siyana kuita michina inoshandiswa nevanhu vakawanda (semuenzaniso, kubvisa pendi/ngura) uye zvishandiso zvine hunyanzvi (semuenzaniso, kugadzira zvinhu zvakasiyana-siyana/fibers munzvimbo dzakamanikana). Kugadzira otomatiki zvizere kuburikidza nekubatanidzwa nemarobhoti eindasitiri inzira yakanaka.
Nguva yekutumira: Chivabvu-14-2026
